Choudhury,P Rai <br/><br/>
MEMS and MOEMS technology and applications 

 -   Prentice - Hall of India, Pvt. ltd., New Delhi  2009 
 - 520 
<br/><br/><label>ISBN: </label>569 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Electronics engineering; Applied physics
<br/><br/><label>Dewey Class. No.: </label>621.381  RAI-M