| 000 | 00434nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 150723s9999 xx 000 0 und d | ||
| 020 | _a1148 | ||
| 082 | _a 621.381 HSU-M | ||
| 100 | _a Hsu, Tai-Ran | ||
| 245 | _a MEMS and microsystem: Design and manufacture | ||
| 260 | _b Tata McGraw Hill Publishing Co. Ltd., New Delhi | ||
| 260 | _c2002 | ||
| 300 | _a432 | ||
| 650 | _a Electronics engineering; Applied physics | ||
| 942 | _cBK | ||
| 999 |
_c1031 _d1031 |
||