| 000 | 00439nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 150723s9999 xx 000 0 und d | ||
| 020 | _a2013 | ||
| 082 | _a 621.381 RAI-M | ||
| 100 | _a Rai-choudhury,P.,Ed. | ||
| 245 | _a MEMS and MOEMS technology and applications | ||
| 260 | _b Prentice - Hall of India, Pvt. ltd., New Delhi | ||
| 260 | _c2012 | ||
| 300 | _a520 | ||
| 650 | _a Electronics engineering; Applied physics | ||
| 942 | _cBK | ||
| 999 |
_c1888 _d1888 |
||